JPH02888B2 - - Google Patents

Info

Publication number
JPH02888B2
JPH02888B2 JP17627083A JP17627083A JPH02888B2 JP H02888 B2 JPH02888 B2 JP H02888B2 JP 17627083 A JP17627083 A JP 17627083A JP 17627083 A JP17627083 A JP 17627083A JP H02888 B2 JPH02888 B2 JP H02888B2
Authority
JP
Japan
Prior art keywords
piezoelectric
vibrator support
sealing body
thin film
sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17627083A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6068710A (ja
Inventor
Hiroaki Sato
Koji Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP17627083A priority Critical patent/JPS6068710A/ja
Publication of JPS6068710A publication Critical patent/JPS6068710A/ja
Publication of JPH02888B2 publication Critical patent/JPH02888B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/105—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a cover cap mounted on an element forming part of the BAW device

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP17627083A 1983-09-26 1983-09-26 圧電薄膜共振子 Granted JPS6068710A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17627083A JPS6068710A (ja) 1983-09-26 1983-09-26 圧電薄膜共振子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17627083A JPS6068710A (ja) 1983-09-26 1983-09-26 圧電薄膜共振子

Publications (2)

Publication Number Publication Date
JPS6068710A JPS6068710A (ja) 1985-04-19
JPH02888B2 true JPH02888B2 (en]) 1990-01-09

Family

ID=16010631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17627083A Granted JPS6068710A (ja) 1983-09-26 1983-09-26 圧電薄膜共振子

Country Status (1)

Country Link
JP (1) JPS6068710A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0531491U (ja) * 1991-09-27 1993-04-23 アイワ株式会社 インナーイヤヘツドホン

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0728003B2 (ja) * 1986-11-10 1995-03-29 松下電器産業株式会社 薄膜ハイブリツドｉｃ
AU2712597A (en) 1997-05-13 1998-12-08 Mitsubishi Denki Kabushiki Kaisha Piezoelectric thin film device
US7230367B2 (en) 2003-11-07 2007-06-12 Matsushita Electric Industrial Co., Ltd. Piezoelectric resonator, production method thereof, filter, duplexer, and communication device
US7242130B2 (en) 2003-11-07 2007-07-10 Matsushita Electric Industrial Co., Ltd. Piezoelectric device, antenna duplexer, and method of manufacturing piezoelectric resonators used therefor
US7113055B2 (en) 2003-11-07 2006-09-26 Matsushita Electric Industrial Co., Ltd. Piezoelectric resonator, method of manufacturing piezoelectric resonator, and filter, duplexer, and communication device using piezoelectric resonator
JP5128981B2 (ja) * 2007-07-25 2013-01-23 日本碍子株式会社 圧電／電歪アクチュエータ及び圧電／電歪アクチュエータの製造方法
WO2010007805A1 (ja) * 2008-07-17 2010-01-21 株式会社 村田製作所 分波器
JP2010035059A (ja) * 2008-07-30 2010-02-12 Tdk Corp 電子デバイス
JP5168568B2 (ja) * 2008-09-01 2013-03-21 Ｔｄｋ株式会社 薄膜バルク波共振器
JP2017046225A (ja) * 2015-08-27 2017-03-02 株式会社ディスコ Ｂａｗデバイス及びｂａｗデバイスの製造方法
WO2022080433A1 (ja) * 2020-10-14 2022-04-21 株式会社村田製作所 弾性波装置及び弾性波装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0531491U (ja) * 1991-09-27 1993-04-23 アイワ株式会社 インナーイヤヘツドホン

Also Published As

Publication number Publication date
JPS6068710A (ja) 1985-04-19

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